Calibration Gases

76.4001 - 80.499% Nitrogen, 19.5 - 23.5% Oxygen, 0.001 - 0.0999% Carbon Monoxide 1 <= 21.5% Oxygen, <= 2% Hydrogen, Balance Nitrogen 2 1 ppm 0.00001 - 0.0499% Phosphine, 99.9501 - 99.99999% Nitrogen 1 10 ppm 0.0001 - 0.02% Hydrogen Chloride, 99.98 - 99.9999% Nitrogen 1 100 ppm Carbon Monoxide, Balance Nitrogen 1 125 ppm 0.0001 - 0.05% Hydrogen Sulfide, 99.95 - 99.9999% Nitrogen 1 25 ppm NO2 1 5 ppm 0.0001 - 0.99% Sulfur Dioxide, 99.11 - 100% Nitrogen Gas 1 5% Carbon Dioxide 1 50 ppm Carbon Monoxide 1 75.75 - 80.4% Nitrogen, 19.5 - 23.5% Oxygen, 0.1 - 0.75% n-Pentane 1

10 ppm Sulfur Dioxide 1 100 ppm Hydrogen 1 500 ppm Hydrogen 1 CO2 1 Hydrogen Chloride 1 Pentane 1 Phosphine 1 Sulfur Dioxide (SO2) 1

2-7/8 in dia x 11-1/2 in L 1 3-1/2 in dia x 15-1/4 in H 1